Plasma FS-DLZ500Z
The FS-DLZ500Z series is an atmospheric plasma surface activation system for cleaning and activating substrate surfaces. It increases surface dyne level, enhances adhesion, improves precision product yield, and eliminates static. Features automatic width adjustment for different product sizes. Widely used in precision electronics, semiconductor packaging, camera module manufacturing, and related industries.
Specifications
Model
MKS-500Z
Input Voltage
220VΒ±10%
Frequency
50/60Hz
Operating Current
Max 3.5A
Input Gas
Compressed Air (CDA), N2, CO2
Input Pressure
0.25~0.5MPa
Gas Flow
25-80LPM
Plasma Power (MAX)
300/500W
Frequency
15-25KHz
Nozzle Type
Direct Spray
Cleaning Height
5-20mm
Effective Width
4mm
Nozzle Qty
1
Control Mode
I/O
Protection Functions
Pressure, Over-current, Under-current, Over-temp
Operating Temp
-10β~+50β
Humidity
20%<93% (non-condensing)
Plasma Temp
Room Temperature
Host Dimensions
450x482x180mm
Nozzle Dimensions
207x38x38.5mm (nozzle dia. 4mm)